Run-to-run control in semiconductor manufacturing

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Run-to-run control in semiconductor...

Run-to-run control in semiconductor manufacturing

Name: Run-to-run control in semiconductor manufacturing
ISBN: 9780849311789

James Moyne, Enrique del Castillo, Arnon M. Hurwitz

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Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

Կատեգորիաներ:

Engineering

Տարի:

2001

Հրատարակում:

Հրատարակչություն:

CRC Press

Լեզու:

english

Էջեր:

333

ISBN 10: